PVD systems
CVD systems
HPPMS/MPP systems
Surface analysis
  For nearly 20 years, ACSEL has developed and utilized various PVD, CVD, surface engineering and analysis facilities at Colorado School of Mines. We specialize in thin film deposition technologies such as magnetron sputtering, PECVD, thermal evaporation, electron beam deposition and CAE, etc. The plasma characterization focuses on measuring the ion energy and ion mass distributions, and electron density and temperature using mass spectrometer and Langmuir probe. The ACSEL and MME department possess various microstructure and surface property analysis facilities, including surface profilometry, X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), atom probe, X-ray photoelectron spectroscopy (XPS), Auger Emission Spectroscopy (AES), differential scanning calorimetry (DSC), Thermogravimetric analysis (TGA), nanoindentation, scratch testers, ball-on-disk wear resistant testers.
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