PVD systems
CVD systems
HPPMS/MPP systems
  Surface analysis
 
 
HPPMS/MPP Systems
 

  As the next generation of magnetron sputtering technique, the high power pulsed magnetron sputtering (HPPMS) technique (also named high power impulse magnetron sputtering (HIPIMS)) has attracted world wide attention. Modulated Pulse Power (MPP) magentron sputtering is an alternative HPPMS deposition technique, which can provide both high deposition rate and a high degree of ionization of the sputtered material. Now, two modulated pulse power (MPP) plasma generators and one MPP AXIS bias power supply have been sucessfuly used in ACSEL PVD systems for producing super dense, high performance, excellent adhesion and extreamlly thick (>50-100 um) metallic, nitride and oxide tribological coatings, nanocomposite coatings, and superlattice coatings, e.g. Cr, Cu,Ta, Ti, CrN, TaN, TiN, CrAlN, TiAlN, TiBCN, Al2O3, CrN/AlN, TiN/CrN, etc,. Read more....

MPP AXIS bias power supply

(This AXIS dc Plasma Generator was specially designed by Zpulser LLC, which can provide and a maximum bias voltage of -200 V on the substrate during the MPP deposition. It can handel a maximum current of 50 A with the arc suppression capability during the pulse to keep a constant negative substrate bias voltage on the substrate).

MPP power supplies attached to the two cathode closed field unbalanced magnetron sputtering system

(Two 5x12 inch2 unbalanced magnetrons, closed magnetic field, computer controled plantary substrate rotation system, IREES reactive gas control system, substrate heating, chamber heating/cooling, three gas manifolds with pressure control, cryo high vacuum pump; dc, PMS and MPP power supplies)

MPP power supplies attached to the four cathode closed field unbalanced magnetron sputtering system

(Four 5x12 inch2 unbalanced magnetrons, closed magnetic field, computer controled two-axis plantary substrate rotation system, IREES reactive gas control system, substrate heating, chamber heating/cooling, three gas manifolds with pressure control, cryo high vacuum pump; dc, PMS and MPP power supplies)

 

 
 
 
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